High Precision Ceramics, Porous Ceramics, Vacuum Chucks Uye Mhepo Flotation Elements
Huru saizi porous ceramic vacuum module
● Inokodzera kufambisa kwemhepo kutenderera, kushambadza, kuona kweAOI yenzvimbo huru dzeLCD panels.
● Uyewo akakodzera kucheka uye machining maitiro.
● Kukura kwepamusoro kwechidimbu chimwe chete ndeye 500 * 500mm.
● Inogona kupatsanurwa maererano nehukuru hwepaneru, kusvika ku2000 * 2000mm kana kupfuura.
● Zvishandiso zvinogona kubvisa static magetsi uye kudzivirira zvigadzirwa kubva kukuvara.
● Base zvinhu: dombo regranite, aluminium extrusion, aluminium alloy.
Antistatic Ceramic Fork
● Resistance value: 105~109 ohm dense ceramic.
● Ruvara: Dema.
● Forogo yakagadzirwa nemhando dzakasiyana-siyana.
● Simba rakakwirira, rakanakisisa antistatic effect.
● Chidimbu chose chiri mune homogeneous antistatic ceramic material panzvimbo yealumina ceramic surface yakaputirwa neESD zvinhu.
Tereyi inotakura ndiro
● Simba rekukweva rakakwirira.
● Kunyatsoita flatness uye parallelism kugaya.
● Porosity 20-25%.
● Kukasharara kwepamusoro
● Porous ceramics nekushomeka kwakaderera uye yakanaka antistatic properties.
● Ukobvu hunogona kugadzirwa maererano nezvinodiwa. Common ukobvu: 0.7mm, 1.0mm, 2.0mm.
● Yekutakura, kushambadza, uye kuchenesa kweSiC neGaAs mawafers.
Static-dissipating dense ceramics
● Resistance value: 105~109 ohms.
● Ruvara: Dema.
● Customized size, kunonyanyisa ukobvu ~ 30mm.
● Panzvimbo pekungoputira antistatic film material pamusoro, bhuroko rese rakagadzirwa ne static-dissipating material, ine yakanakisa static-dissipating effect.
● Inokodzera senheyo yezvikamu zvemuchina chaiwo kana zvikamu zvinoda kubvisa static magetsi
Chuck Tafura Wafer Kucheka Disc
● Inowanzo shandiswa pakucheka kwechingwa uye kuchenesa.
● Porous ceramic resistance value: 106 ~ 108 ohms.
● Kukuya kwepamusoro kunosvika ku
● 6", 8", 12" inch wafer dicing tireyi ine simbi isina tsvina.
● High kufanana uye yakakwirira adsorption.
Non-contact transmission air floating plate
● Chigadzirwa chacho chinogona kusimudzwa nemhepo kuti chizadzise mhedzisiro yekumisa uye kusingabatanidzi kutamiswa pasi pekumanikidza kwakanaka.
● Masikirwo akaenzana: 500 * 100 * 40, 750 * 100 * 40 uye 1000 * 100 * 40mm.
● Porous ceramic iri mu static-dissipating material kudzivirira dambudziko remagetsi.
● Kushandiswa kwemhepo, kumanikidzwa kwemhepo uye kureba kwemhepo kunoyangarara kunogona kudzorwa zvichienderana nekukura kweceramic pore.
● Positive and negative pressure pressureway inogona kugadzirwa kuti ipe mhepo yakatsetseka uye yakagadzikana inofamba.
● Porous ceramic sintered pakupisa kwepamusoro nesimba guru uye kupfeka kuramba, izvo zvisingabudisi guruva.
Air Bearing
● Diki pore size (
● Inogona kutsungirira dzvinyiriro huru yenguva refu.
● Kushandiswa kwegasi shoma uye kusimba kwegasi kwakanakisa.
● Inogona kugadzikana kutakura uremu hombe (> 100KG) uye haisi nyore kugadzira mhepo sando mhedzisiro.
● Kukura uye chimiro zvinogona kugadziriswa.
● Ceramic zvinhu hazvisi nyore kukweshwa, uye hazvibudisi guruva, rakakodzera kushandiswa pamichina yakakwirira-yakanyanya.
Heated vacuum chuck
● Adsorption uye kupisa kwezvinhu panguva imwe chete.
● Iyo yakanyanya kupisa tembiricha i150 degrees Celsius.
● Mahwendefa e ceramic e porous ceramic vacuum module anogona kugadziriswa uye kuchinjwa mumwe nomumwe.
● Ukuru hwe porous ceramic vacuum module inogona kugadziriswa.
● Yakasimba adsorption, nyore kushanda.
Porous Ceramic Tube
● Yakagadzirirwa kuita Roll-to-Roll process.
● Kune optical film, micro-nano imprinting tekinoroji, yakaonda firimu LCD process.
● Inoshandiswa kune marudzi ose emafirimu akaonda maitiro, anogona kushandiswa senzira inopfuurira yekugadzira.
● Inogona kuzadzisa chinangwa chechipiri chekudzvinyirira kwakashata adsorption uye kutenderera kwakanaka kwemhepo flotation.
● Ceramic chubhu inogadzirwa ne antistatic material.
● Kureba kusvika ~ 700mm, pombi dhayamita kusvika ~ 200mm.
