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Low Frequency Pneumatic Isolation Solutions

Low frequency vibration and shock can affect the accuracy, repeatability and throughput of precision measuring, positioning and manufacturing equipment. Since finer resolution of a finished product is required, manufacturing, metrology, engineering and research facilities require increased dynamic stability. Low frequency and ultra-low frequency vibration isolation is a method of improving the current vibration environment to achieve a significant increase in precision manufacturing accuracy or to offer a solution which approaches the “vibration free” domain.


Vibrations originating from machines or other sources (acoustically) are transmitted to a support structure such as a facility floor, and can cause a detrimental environment and unwanted levels of

vibration.


Some of the equipment and processes affected by vibration include precision machine tools, coordinate measuring machines, magnetic resonance imaging (MRI/NMR) equipment, laboratory and semiconductor processing equipment.

The purpose of vibration isolation is to control unwanted vibration so that its adverse effects are kept within acceptable limits. Isolators are designed to provide vibration and shock protection to these and other types of equipment.

    Precision-AireTM Leveling Isolators (PAL)

    PAL-type pneumatic isolators provide superior low frequency isolation for metrology instruments, electron microscopes, MRI units, coordinate
    measuring machines and precision manufacturing equipment.

    PAL isolators react quickly to changes in the supported load and to center of gravity shifts by automatically releveling to a preset position.

    A pneumatic isolation system’s performance is a compromise between natural frequency (isolation), valve leveling accuracy and settling time.

    Settling time can be defined as the time it takes for an isolation system’s motion to return to a predetermined reference with respect to a defined input disturbance. The disturbance can be an environmental input or machine induced, such as a gantry or stage movement.

    Settling time is minimal with optimum damping and corresponding valve flow. Long settling times using pneumatic isolators are unacceptable because precision measuring and positioning machines can suffer repeatability errors and throughput losses.

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    Custom/OEM Isolators

    High-end three-dimensional flexible robotic cutting applications, to achieve bevel cutting function, the pipe and the torch using the servo positioning function.

    Isolators for OEM applications or having custom requirements are available for easy integration into machine designs. For cleanroom applications, the exhaust air from the leveling valves is vented and the isolators are made using cleanroom compatible materials, cleaned and packaged. Isolators can also be made using nonmagnetic materials.

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    Leveling Valves

    A wide range of leveling valves are available. Leveling valves have accuracies from +/- 0.006” (0.15 mm) to +/- 0.001” (0.025 mm)* with adjustable flow rates to accommodate application requirements. Valve stiffness, flow rate and accuracy are important variables to optimum isolator settling time and isolation efficiency.

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    Precision-AireTM Pneumatic Leveling Mounts (PLM)

    PLM mounts provide low frequency vibration and shock control for surface plates, coordinate measuring machines, fans, air compressors, motor/generator sets, high-speed punch presses and more.

    The Fabreeka PLM series pneumatic isolation mounts are low frequency vibration and shock isolators that provide both attenuation of disturbing vibration and equipment leveling.

    For vibration control applications, the pneumatic (pressurized) portion of these mounts provides significant reduction of vibration amplitudes occurring at frequencies above 5 Hz, having a natural frequency as low as 3 Hz.

    PLM isolation mounts will also continue to isolate with no pressure having a vertical natural frequency of approximately 10 Hz, isolating frequencies above 14 Hz.

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    The vertical to horizontal natural frequency ratio is approximately 1:1 with a high degree of horizontal stability.

    For shock or impact applications, the outer elastomeric wall construction provides a high deflection shock mount. A low natural frequency (3 Hz) can be maintained by utilizing an external spacer to prevent a “bottom out” condition.

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