High Precision Ceramics, Porous Ceramics, Vacuum Chucks And Air Flotation Elements
Large size porous ceramic vacuum module
● Suitable for air flotation transfer, adsorption, AOI detection of large-area LCD panels.
● Also suitable for cutting and machining processes.
● The maximum size of a single piece is 500*500mm.
● It can be spliced according to the panel size, up to 2000*2000mm or more.
● Materials that can eliminate static electricity and avoid the products from being damaged.
● Base material: granite stone, aluminum extrusion, aluminum alloy.
Antistatic Ceramic Fork
● Resistance value: 105~109 ohm dense ceramic.
● Colour: Black.
● Customized fork with various type.
● High strength, excellent antistatic effect.
● The entire piece is in homogeneous antistatic ceramic material instead of alumina ceramic surface plated with ESD material.
Thin plate carrier tray
● High suction power.
● High precision flatness and parallelism grinding.
● Porosity 20-25%.
● Surface roughness <2.0µm.
● Porous ceramics with low resistance and good antistatic properties.
● Thickness can be customized according to requirements. Common thickness: 0.7mm, 1.0mm, 2.0mm.
● For loading, adsorption, and cleaning of SiC and GaAs wafers.
Static-dissipating dense ceramics
● Resistance value: 105~109 ohms.
● Colour: Black.
● Customized size, maximum thickness ~30mm.
● Instead of only plating antistatic film material on the surface, the whole block is made of static-dissipating material, with excellent static-dissipating effect.
● Suitable as the base of precision machine parts or components that need to eliminate static electricity
Chuck Table Wafer Cutting Disc
● Commonly used for wafer cutting and cleaning.
● Porous ceramic resistance value: 106~108 ohms.
● Surface grinding accuracy reaches to <5µm.
● 6", 8", 12" inch wafer dicing tray with stainless steel base.
● High uniformity and high adsorption.
Non-contact transmission air floating plate
● The product can be lifted by air to achieve the effect of suspension and non-contact transfer under positive pressure.
● Common sizes: 500*100*40, 750*100*40 and 1000*100*40mm.
● Porous ceramic is in static-dissipating material to avoid static electricity problems.
● Air consumption, air supply pressure and air float height can be controlled according to the ceramic pore size.
● Positive and negative pressure airway can be designed to provide smooth and stable moving airflow.
● Porous ceramic sintered at high temperature with high strength and wear resistance, which doesn’t generate dust.
Air Bearing
● Small pore size (<0.5µm) with high strength. Sintered under very high temperature.
● Can withstand long-term high pressure.
● Minimal gas consumption and excellent overall gas rigidity.
● It can stably carry large weight (>100KG) and is not easy to produce air hammer effect.
● Size and shape can be customized.
● Ceramic material is not easy to be scratched, and does not generate dust, suitable for being used on high-precision machines.
Heated vacuum chuck
● Adsorption and heating of the items at the same time.
● The maximum heating temperature is 150 degrees Celsius.
● The ceramic plates of the porous ceramic vacuum module can be repaired and replaced individually.
● The size of the porous ceramic vacuum module can be customized.
● Strong adsorption, easy to operate.
Porous Ceramic Tube
● Designed for Roll-to-Roll process.
● For optical film, micro-nano imprinting technology, thin film LCD process.
● Applicable to all kinds of thin film processes, can be used as a continuous production process.
● It can achieve the dual purpose of negative pressure adsorption and positive pressure air flotation.
● Ceramic tube is made of antistatic material.
● Length up to ~700mm, pipe diameter up to~200mm.
