High Precision Ceramics & Porous Ceramics from China Suppliers | Vacuum Chucks & Air Float Elements Factory
Large size porous ceramic vacuum module
- Suitable for air flotation transfer, adsorption, AOI detection of large-area LCD panels.
- Also suitable for cutting and machining processes.
- The maximum size of a single piece is 500*500mm.
- It can be spliced according to the panel size, up to 2000*2000mm or more.
- Materials that can eliminate static electricity and avoid the products from being damaged.
- Base material: granite stone, aluminum extrusion, aluminum alloy.
Antistatic Ceramic Fork
- Resistance value: 105~109 ohm dense ceramic.
- Colour: Black.
- Customized fork with various type.
- High strength, excellent antistatic effect.
- The entire piece is in homogeneous antistatic ceramic material instead of alumina ceramic surface plated with ESD material.
Thin plate carrier tray
- High suction power.
- High precision flatness and parallelism grinding.
- Porosity 20-25%.
- Surface roughness <2.0µm.
- Porous ceramics with low resistance and good antistatic properties.
- Thickness can be customized according to requirements. Common thickness: 0.7mm, 1.0mm, 2.0mm.
- For loading, adsorption, and cleaning of SiC and GaAs wafers.
Static-dissipating dense ceramics
- Resistance value: 105~109 ohms.
- Colour: Black.
- Customized size, maximum thickness ~30mm.
- Instead of only plating antistatic film material on the surface, the whole block is made of static-dissipating material, with excellent static-dissipating effect.
- Suitable as the base of precision machine parts or components that need to eliminate static electricity.
Chuck Table Wafer Cutting Disc
- Commonly used for wafer cutting and cleaning.
- Porous ceramic resistance value: 106~108 ohms.
- Surface grinding accuracy reaches to <5µm.
- 6", 8", 12" inch wafer dicing tray with stainless steel base.
- High uniformity and high adsorption.
Non-contact transmission air floating plate
- The product can be lifted by air to achieve the effect of suspension and non-contact transfer under positive pressure.
- Common sizes: 500*100*40, 750*100*40 and 1000*100*40mm.
- Porous ceramic is in static-dissipating material to avoid static electricity problems.
- Air consumption, air supply pressure and air float height can be controlled according to the ceramic pore size.
- Positive and negative pressure airway can be designed to provide smooth and stable moving airflow.
- Porous ceramic sintered at high temperature with high strength and wear resistance, which doesn’t generate dust.
Air Bearing
- Small pore size (<0.5µm) with high strength. Sintered under very high temperature.
- Can withstand long-term high pressure.
- Minimal gas consumption and excellent overall gas rigidity.
- It can stably carry large weight (>100KG) and is not easy to produce air hammer effect.
- Size and shape can be customized.
- Ceramic material is not easy to be scratched, and does not generate dust, suitable for being used on high-precision machines.
Heated vacuum chuck
- Adsorption and heating of the items at the same time.
- The maximum heating temperature is 150 degrees Celsius.
- The ceramic plates of the porous ceramic vacuum module can be repaired and replaced individually.
- The size of the porous ceramic vacuum module can be customized.
- Strong adsorption, easy to operate.
Porous Ceramic Tube
- Designed for Roll-to-Roll process.
- For optical film, micro-nano imprinting technology, thin film LCD process.
- Applicable to all kinds of thin film processes, can be used as a continuous production process.
- It can achieve the dual purpose of negative pressure adsorption and positive pressure air flotation.
- Ceramic tube is made of antistatic material.
- Length up to ~700mm, pipe diameter up to~200mm.
Frequently Asked Questions (FAQ)
What are the primary applications of the Large Size Porous Ceramic Vacuum Module?
It is designed for air flotation transfer, adsorption, and AOI detection of large-area LCD panels, and is also suitable for wafer cutting and precision machining processes.
How does the Antistatic Ceramic Fork protect components from electrostatic discharge (ESD)?
The entire piece is constructed from homogeneous antistatic dense ceramic material (resistance value: 105~109 ohms) instead of just being surface-plated, providing stable and long-lasting antistatic protection.
Can the thickness of the Thin Plate Carrier Tray be customized?
Yes, the thickness can be customized to requirements. Common standard thicknesses include 0.7mm, 1.0mm, and 2.0mm, widely used for loading, adsorption, and cleaning of SiC and GaAs wafers.
What makes the Porous Ceramic Air Bearing suitable for high-precision machines?
It features a sub-micron pore size (<0.5µm) with high strength, minimal gas consumption, high rigidity, and does not generate dust or scratch easily, allowing it to carry loads over 100KG stably.
Can the Heated Vacuum Chuck perform heating and vacuum holding at the same time?
Yes, it is engineered to achieve both negative pressure adsorption and heating simultaneously, supporting maximum heating temperatures of up to 150 degrees Celsius.