High Precision Ceramics and Porous Ceramics from China Suppliers | Vacuum Chucks and Air Flotation Elements Factory
Large size porous ceramic vacuum module
- Suitable for air flotation transfer, adsorption, AOI detection of large-area LCD panels.
- Also suitable for cutting and machining processes.
- The maximum size of a single piece is 500*500mm.
- It can be spliced according to the panel size, up to 2000*2000mm or more.
- Materials that can eliminate static electricity and avoid the products from being damaged.
- Base material: granite stone, aluminum extrusion, aluminum alloy.
Antistatic Ceramic Fork
- Resistance value: 105~109 ohm dense ceramic.
- Colour: Black.
- Customized fork with various type.
- High strength, excellent antistatic effect.
- The entire piece is in homogeneous antistatic ceramic material instead of alumina ceramic surface plated with ESD material.
Thin plate carrier tray
- High suction power.
- High precision flatness and parallelism grinding.
- Porosity 20-25%.
- Surface roughness <2.0µm.
- Porous ceramics with low resistance and good antistatic properties.
- Thickness can be customized according to requirements. Common thickness: 0.7mm, 1.0mm, 2.0mm.
- For loading, adsorption, and cleaning of SiC and GaAs wafers.
Static-dissipating dense ceramics
- Resistance value: 105~109 ohms.
- Colour: Black.
- Customized size, maximum thickness ~30mm.
- Instead of only plating antistatic film material on the surface, the whole block is made of static-dissipating material, with excellent static-dissipating effect.
- Suitable as the base of precision machine parts or components that need to eliminate static electricity.
Chuck Table Wafer Cutting Disc
- Commonly used for wafer cutting and cleaning.
- Porous ceramic resistance value: 106~108 ohms.
- Surface grinding accuracy reaches to <5µm.
- 6", 8", 12" inch wafer dicing tray with stainless steel base.
- High uniformity and high adsorption.
Non-contact transmission air floating plate
- The product can be lifted by air to achieve the effect of suspension and non-contact transfer under positive pressure.
- Common sizes: 500*100*40, 750*100*40 and 1000*100*40mm.
- Porous ceramic is in static-dissipating material to avoid static electricity problems.
- Air consumption, air supply pressure and air float height can be controlled according to the ceramic pore size.
- Positive and negative pressure airway can be designed to provide smooth and stable moving airflow.
- Porous ceramic sintered at high temperature with high strength and wear resistance, which doesn’t generate dust.
Air Bearing
- Small pore size (<0.5µm) with high strength. Sintered under very high temperature.
- Can withstand long-term high pressure.
- Minimal gas consumption and excellent overall gas rigidity.
- It can stably carry large weight (>100KG) and is not easy to produce air hammer effect.
- Size and shape can be customized.
- Ceramic material is not easy to be scratched, and does not generate dust, suitable for being used on high-precision machines.
Heated vacuum chuck
- Adsorption and heating of the items at the same time.
- The maximum heating temperature is 150 degrees Celsius.
- The ceramic plates of the porous ceramic vacuum module can be repaired and replaced individually.
- The size of the porous ceramic vacuum module can be customized.
- Strong adsorption, easy to operate.
Porous Ceramic Tube
- Designed for Roll-to-Roll process.
- For optical film, micro-nano imprinting technology, thin film LCD process.
- Applicable to all kinds of thin film processes, can be used as a continuous production process.
- It can achieve the dual purpose of negative pressure adsorption and positive pressure air flotation.
- Ceramic tube is made of antistatic material.
- Length up to ~700mm, pipe diameter up to ~200mm.
Frequently Asked Questions (FAQ)
What makes your antistatic ceramics superior to surface-plated solutions?
Our antistatic ceramics are made of homogeneous ESD-safe materials throughout the entire block instead of just applying a surface plating. This ensures stable and long-lasting static dissipation (10^5 to 10^9 ohms) even after long-term wear or surface machining.
Can the porous ceramic vacuum modules be customized for larger display panels?
Yes, while the maximum size of a single piece is 500*500mm, they can be precisely spliced together on bases like granite stone or aluminum alloy to match panel sizes up to 2000*2000mm or more.
Are these porous ceramic components suitable for cleanroom environments?
Absolutely. Our porous ceramics are sintered at extremely high temperatures, resulting in high mechanical strength, scratch resistance, and wear resistance. They do not generate dust or particles during operations like air bearing movement or wafer cutting.
What is the typical application and thickness of the carrier trays?
Thin plate carrier trays are primarily used for loading, adsorption, and cleaning of SiC and GaAs wafers. They feature a high porosity of 20-25% and are available in common thicknesses of 0.7mm, 1.0mm, and 2.0mm, with options for customized thickness.
How does the heating vacuum chuck perform under thermal conditions?
The heated vacuum chuck allows for simultaneous adsorption and heating up to a maximum temperature of 150 degrees Celsius. Additionally, the individual porous ceramic plates can be repaired and replaced independently to reduce maintenance costs.