Design and Assembly of Machines for Semiconductor Industry
Impurity automatic screening machine
Introduction: The orthogonal robotic arm combines with the CCD image recognition system to screen impurities. The CCD camera is used to capture the items, and the software automatically identifies the impurities and calculates the coordinates of the impurities' location, and takes them out through the straw.
Application: Impurity screening
Desktop spinneret inspection machine
Introduction: The orthogonal robot arm combines the CCD image recognition system to detect the spinneret and identify whether the spinneret is blocked or worn out.
Application: Spinneret inspection, micro hole inspection, surface defect or dimensional inspection.
High-precision visual alignment system
Introduction: The high-precision visual alignment system mainly provides high-precision alignment of two objects. The difference from general coaxial visual alignment is that the two objects under test do not need to be stacked and use off-axis alignment. Way.
Application: Mask alignment, nanoimprint alignment.
Flexible collet trenching machine
Introduction: Automatic loading and unloading, automatic image judgment of groove alignment, groove cutting. The cutting process is fully automated, with stable speed and quality. The self-developed image detection system determines whether the collet is cracked for quality control.
Application: Automatic groove cutting by elastic collet.
High-precision two-dimensional image measuring machine
Introduction:
Stroke: 0.5m*1.5m
Structure: Granite frame
Drive device: linear motor (single drive)
Guide device: linear slide rail
Imaging device: CCD+ microscopic optical system + laser focusing system
Feedback device: laser interferometer
Application: Panel size and defect detection, PCB board detection
High-precision two-dimensional image measuring machine
Introduction:
Stroke: 1.3m*1.5m
Structure: Granite frame
Driving device: linear motor (dual drive)
Guide device: linear slide rail
Imaging device: CCD + microscopic optical system + laser focusing system
Feedback device: laser interferometer
Application: Panel size and defect detection, PCB board detection
Design of long-stroke two-dimensional image measuring machine
Introduction:
Stroke: 2m*1.3m (gantry span more than 2m)
Structure: granite base + aluminum frame
Drive device: linear motor
Guide device: linear slide rail
Imaging device: Equipped with metallographic microscope
Feedback device: optical ruler
Application: Panel size and defect detection, PCB board detection
High-precision two-dimensional image measuring machine
Introduction:
Stroke:0.75m*0.9m
Structure:Granite frame
Drive device: linear motor
Guide device: air-floating guide rail
Imaging device: CCD+microscopic optical system+laser focusing system
Feedback device: laser interferometer
Application: Panel size and defect detection, PCB board inspection
Substrate thickness and outer diameter measuring machine
Introduction: The hollow XY-axis linear motor positioning platform is combined with a laser probe to measure the thickness and warpage of the substrate, and is combined with an image measurement device to detect outer diameter and defects.
The bottom of the platform is equipped with a LIFT PIN, which automatically lifts and unloads materials. It can be combined with the SCARA robotic arm for automatic loading and unloading.
Application: Substrate thickness, warpage, outer diameter measurement and defect detection.
